MEMS gas sensors: a review
Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years...
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主要な著者: | Ahmad Asri, Muhammad Izzudin, Hasan, Md. Nazibul, Ahmad Fuaad, Mariatul Rawdhah, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan |
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フォーマット: | 論文 |
出版事項: |
Institute of Electrical and Electronics Engineers Inc.
2021
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主題: | |
オンライン・アクセス: | http://eprints.utm.my/id/eprint/94263/ http://dx.doi.org/10.1109/JSEN.2021.3091854 |
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