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MEMS gas sensors: a review

Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years...

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Main Authors:	Ahmad Asri, Muhammad Izzudin, Hasan, Md. Nazibul, Ahmad Fuaad, Mariatul Rawdhah, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan
格式:	Article
出版:	Institute of Electrical and Electronics Engineers Inc. 2021
主题:	TK Electrical engineering. Electronics Nuclear engineering
在线阅读:	http://eprints.utm.my/id/eprint/94263/ http://dx.doi.org/10.1109/JSEN.2021.3091854
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