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Modeling and Microfabrication of a CMOS Resonator for Magnetic Field Measurement

This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout...

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書誌詳細
主要な著者:	Dennis , John Ojur, Ahmad, Farooq, Md Khir, Mohd Haris, Hamid, Nor Hisham
フォーマット:	Conference or Workshop Item
出版事項:	2012
主題:	TK Electrical engineering. Electronics Nuclear engineering
オンライン･アクセス:	http://ieeexplore.ieee.org http://eprints.utp.edu.my/8798/
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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