Modeling and Microfabrication of a CMOS Resonator for Magnetic Field Measurement

• Main Authors: Dennis , John Ojur, Ahmad, Farooq, Md Khir, Mohd Haris, Hamid, Nor Hisham
• Format: Conference or Workshop Item
• Published: 2012
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://ieeexplore.ieee.org; http://eprints.utp.edu.my/8798/

This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout...