封面图片

A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. T...

Saved in:

书目详细资料
Main Authors:	Md Khir, Mohd Haris, Qu, Hongwei
格式:	Conference or Workshop Item
出版:	2010
主题:	TK Electrical engineering. Electronics Nuclear engineering
在线阅读:	http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf http://eprints.utp.edu.my/3451/
标签:	添加标签没有标签, 成为第一个标记此记录!

相似书籍

A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass
由: Md Khir, Mohd Haris, et al.
出版: (2011)

A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications
由: Md Khir, Mohd Haris, et al.
出版: (2010)

Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
由: Narayanamurthy, Vigneswaran, et al.
出版: (2017)

Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
由: Yusof, Norliana, et al.
出版: (2021)

Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer
由: Yusof, N., et al.
出版: (2016)

Effect of beams structures on dynamic behavior of piezoresistive accelerometer sensors
由: Yusof, N., et al.
出版: (2017)

Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using CoventorWare Simulation Software
由: Dennis , John Ojur, et al.
出版: (2012)

MEMS piezoresistive accelerometer sensor for gait analysis
由: Siti Nurdiyana, Abd. Rashid
出版: (2017)

Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing
由: Mirza,, Asif, et al.
出版: (2011)

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
由: AHMED ALMAHI, ABDELAZIZ YOUSIF
出版: (2015)

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
由: AHMED ALMAHI, ABDELAZIZ YOUSIF
出版: (2016)

A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing
由: Ahmad, Farooq, et al.
出版: (2011)

A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing
由: Ahmad, Farooq, et al.
出版: (2012)

A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing
由: Ahmad, Farooq, et al.
出版: (2011)

Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer
由: Norliana, Yusof, et al.
出版: (2016)

Multi‑frequency CMOS oscillator based on CMOS MEMS SAW resonator
由: Karim, Jamilah, et al.
出版: (2015)

Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
由: Ahmed, Abdelaziz Yousif, et al.
出版: (2011)

CMOS-MEMS PIEZOELECTRIC ENERGY HARVESTING SYSTEM
由: SUHAIDIN, SITI NURHAKMI
出版: (2011)

Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
由: Ahmed, Abdelaziz Yousif, et al.
出版: (2011)

ELECTROMAGNETIC BASED CMOS-MEMS ENERGY HARVESTING SYSTEM
由: ABDUL RAHMAN, ZATI HANANI
出版: (2011)

CAPACITIVE BASED CMOS-MEMS MICROACTUATOR FOR BIOMEDICAL APPLICATION
由: Samuri, Marfarahain
出版: (2011)

Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
由: L., Sujatha, et al.
出版: (2016)

Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach
由: Mohamad, Mazita, et al.
出版: (2018)

THE EFFECTS OF TEMPERATURE AND RELATIVE HUMIDITY ON THE PERFORMANCE OF CMOS-MEMS RESONATOR
由: JAN, MOHAMMAD TARIQ
出版: (2017)

Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
由: Norliana, Yusof, et al.
出版: (2021)

Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining
由: Ahmad Fitri, Anuar Mahayudin
出版: (2017)

Design, Modeling And Simulation Of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor For Capnometry
由: Nor Hisham bin Hamid ,, et al.
出版: (2012)

Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
由: FADLALLA, MOHAMED AHMED ELTAYEB
出版: (2017)

Performance Analysis and Calibration of a Novel CMOS-MEMS Humidity Sensor
由: Ba Wazir, Abdulaziz Saleh Mahfoudh
出版: (2016)

Design and optimization of mems accelerometer sensor for lower limb exoskeleton application / Muhammad Fareq Ibrahim
由: Muhammad Fareq , Ibrahim
出版: (2018)

ANALYSIS OF THE SENSITIVITY AND THERMAL STABILITY OF A CMOS-MEMS RELATIVE HUMIDITY SENSOR
由: BASUWAQI, ALA MAHFOUDH ABDULLAH
出版: (2019)

Design and Simulation of a Readout Circuit for Capacitive Sensing in CMOS-MEMS Devices
由: Abdul Rahman, Ahmad Jazli
出版: (2015)

Bluetooth Accelerometer Mouse
由: Shanthini S. Selvaraja, Shanthini
出版: (2010)

CMOS-MEMS VIBRATION ENERGY HARVESTER BASED ON ENERGY PUMPING FREQUENCY INCREASE METHOD
由: ALI, IMRAN
出版: (2018)

A STUDY ON THE SENSITIVITY OF THE LORENTZ FORCEBASED CMOS-MEMS MAGNETOMETER FOR E-COMPASS APPLICATIONS
由: AL-MAHDI, OSAMAH LUTF QAID
出版: (2022)

Piezoresistive Elastomer Sensor for Electronic Skin Application
由: Chong, Yung Sin
出版: (2016)

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS STATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR
由: ,, FAROOQ AHMAD
出版: (2015)

Modeling and Microfabrication of a CMOS Resonator for Magnetic Field Measurement
由: Dennis , John Ojur, et al.
出版: (2012)

Design and analysis of Three-Axis Piezoresistive accelerometer
由: Suraya Abdullah
出版: (2008)

Development of an Activity Recognition System Using Accelerometers
由: Hui, Dandy Lau Jing
出版: (2014)