A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications
This paper reports the design and microfabrication of a CMOS-MEMS capacitive force sensor capable of nano-Newton out-of-plane force measurement. Sidewall and fringe capacitance formed by the multiple CMOS metal layers were utilized and fully differential sensing was enabled by common-centroid wiring...
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Main Authors: | Md Khir, Mohd Haris, Qu, Hongwei |
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格式: | Conference or Workshop Item |
出版: |
2010
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主題: | |
在線閱讀: | http://eprints.utp.edu.my/3442/1/A_CMOS-MEMS_Nano-Newton_Force_Sensor_for_Biomedical_Applications.pdf http://eprints.utp.edu.my/3442/ |
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