A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications
This paper reports the design and microfabrication of a CMOS-MEMS capacitive force sensor capable of nano-Newton out-of-plane force measurement. Sidewall and fringe capacitance formed by the multiple CMOS metal layers were utilized and fully differential sensing was enabled by common-centroid wiring...
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/3442/1/A_CMOS-MEMS_Nano-Newton_Force_Sensor_for_Biomedical_Applications.pdf http://eprints.utp.edu.my/3442/ |
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