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A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications

This paper reports the design and microfabrication of a CMOS-MEMS capacitive force sensor capable of nano-Newton out-of-plane force measurement. Sidewall and fringe capacitance formed by the multiple CMOS metal layers were utilized and fully differential sensing was enabled by common-centroid wiring...

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書誌詳細
主要な著者:	Md Khir, Mohd Haris, Qu, Hongwei
フォーマット:	Conference or Workshop Item
出版事項:	2010
主題:	TK Electrical engineering. Electronics Nuclear engineering
オンライン･アクセス:	http://eprints.utp.edu.my/3442/1/A_CMOS-MEMS_Nano-Newton_Force_Sensor_for_Biomedical_Applications.pdf http://eprints.utp.edu.my/3442/
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